Cambridge Royce - Cluster Tool Open Hour

The Royce Institute Ambient Cluster Processing & Research Facility is a custom-built glovebox cluster tool that integrates different vacuum and liquid-based deposition technologies for a wide range of functional materials into a common inert glove box atmosphere. It comprises ten glove box modules that are interconnected by a semi-automated inert atmosphere transfer system and includes Pulsed Laser Deposition (PLD), Atomic Layer Deposition (ALD), Aerosol Jet Printing, Slot Die Coating, Organic Thermal Evaporator, Perovskite/Hybrid Evaporator, as well as modules for metrology, thin film encapsulation and packaging.

This open access tool can be used by both academia and industry and gives access to a wide range of functional materials, including transition metal oxides for battery and other applications, organic and hybrid organic-inorganic semiconductors, two-dimensional materials, polymer composites and other associated materials.

Its unique configuration allows integration of these different classes of materials into novel hetero-architectures and but also fabrication of a wide range of devices including solar cells, batteries, mechanical or thermoelectric energy harvesters as well as integrated energy systems for energy–efficient ICT applications.

This tour will give an overview of the capabilities of the Ambient Cluster Processing & Research Facility as well as information on booking, funding opportunities and the work of the Royce Institute.

For more information about Royce Facilities @ Cambridge please contact royce@maxwell.cam.ac.uk and see our full equipment listing at: https://www.maxwell.cam.ac.uk/programmes/henry-royce-institute